High Vacuum Connection DN 160 ISO-K Fore Vacuum Connection DN 40 KF Pumping speed of Diffusion Pump 1100 I/S With Baffle BFA…W/L 620 I/S With Baffle BFA…W/L 580 I/S With BFA…M/MF and Plate Valve 425 I/S For Water vapor with LN2 cooling 2700 3-phase 380v/50Hz

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