Massedurchflussregler, analog Durchflussendwerte von: 10 mln/min bis 30 ln/min N2 (eingestellter Messbereich: siehe Prozessdaten) Messunsicherheit: +/- 1% v. Endwert Reproduzierbarkeit: +/- 0,25% Messspannenverhältnis: 50:1 Betriebsdruck: max. 100 bar Betriebstemperatur: 0-70°C Spannungsversorgung: +/- 15 Vdc

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